In today's world, specular surface challanges 3D measurement technology.
Based on Phase Measuring Deflectometry, Mu3's specular-surface-inspection function is able to reach nanometer precision. Mu3 technology enables automated optical inspection for glass, metal, wafer, and mirror-like surfaces.
Field of View | 100mm x 80mm (Custom sizes available) |
Local Sensitivity | 50 nm |
Measurement Speed | 2 seconds |
Accuracy | Curvature : +- 0.01 Diopter |
Measuring Principle | Phase Measuring Deflectometry |
Operating System | Windows 7 / Windows 8 / Windows 10 (32/64-bit) |
Interface | dll available for custom software development |